JPH0314165U - - Google Patents
Info
- Publication number
- JPH0314165U JPH0314165U JP7594489U JP7594489U JPH0314165U JP H0314165 U JPH0314165 U JP H0314165U JP 7594489 U JP7594489 U JP 7594489U JP 7594489 U JP7594489 U JP 7594489U JP H0314165 U JPH0314165 U JP H0314165U
- Authority
- JP
- Japan
- Prior art keywords
- evacuation
- susceptor
- chamber
- isolating
- evacuation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7594489U JPH0314165U (en]) | 1989-06-28 | 1989-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7594489U JPH0314165U (en]) | 1989-06-28 | 1989-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0314165U true JPH0314165U (en]) | 1991-02-13 |
Family
ID=31616966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7594489U Pending JPH0314165U (en]) | 1989-06-28 | 1989-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0314165U (en]) |
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1989
- 1989-06-28 JP JP7594489U patent/JPH0314165U/ja active Pending